Diffusion Vacuum Pumps for High Vacuum Applications RANGU DF 1000 - 2800 A
Robust and proven
Rangu diffusion vacuum pumps work according to the proven vapour steam principle and are characterized by their outstanding reliability. Even under the most demanding operating conditions that would destroy other vacuum pumps, the Rangu diffusion vacuum pumps are operationally reliable, with consistently high performance and a long life span.
Operationally reliable and cost-effective
With Rangu diffusion vacuum pumps, almost all reactive gases and vapours can be pumped. They function with a high degree of efficiency and require very little maintenance.
Rangu diffusion vacuum pumps can be operated with an inlet pressure from 10-3 mbar. To generate the fore-vacuum, we recommend a vacuum system consisting of a proven R 5 rotary vane vacuum pump or a COBRA dry-running screw vacuum pump, each with a vacuum pump as a booster. Busch offers an extensive range of vacuum systems that offer excellent adjustment possibilities for generating the fore-vacuum for Rangu diffusion vacuum pumps.
Rangu diffusion vacuum pumps are ideally suited for all industrial high-vacuum applications, such as:
• Glass coating units
• Vacuum furnaces
• Metal coatings
• Physical vapour deposition (PVD)
• Surface treatments
• Thin film coating
The basic component of Rangu diffusion vacuum pumps is a cylindrical pump unit with a heatable bottom. Oil is used as the pump fluid and is heated up. The vapour from this oil rises into the nozzle system and is then passed through several vapour steam stages and out of this system under high pressure. The molecules in the process gas are caught by these vapour steams and carried downwards, towards the outlet of the backing pump. The oil vapour condenses on the inner surface of the water-cooled pump unit and is directed back to the bottom. With their multi-stage, innovative nozzle concept, Rangu diffusion vacuum pumps offer an extremely high and stable pumping speed.
|Technical data||Rangu DF 1000 A||Rangu DF 1700 A||Rangu DF 2800 A|
|Nominal pumping speed for N2||l/s||10000||17300||28000|
|Recommended size of forepump||m3/h||170||510||510|
|Ultimate pressure*||hPa (mbar)||< 7·10-8||< 7·10-8||< 7·10-8|
|Max. foreline pressure for N2||hPa (mbar)||0.85||0.65||0.71|
|Cooling water consumption||l/h||300||800||800|
|Required cooling water temperature||°C||15 - 26||15 - 26||15 - 26|
|Warm up time||minutes||45||60||60|
|Dimensions (W x H x Ø)||mm||1030 x 1219 x 630||1173 x 1740 x 800||1673 x 1832 x 1000|
|Connection flange inlet/exhaust side||DN 630 ISO-K / DN 160 ISO-K||DN 800 ISO-K / DN 200 ISO-K||DN 1000 ISO-K / DN 200 ISO-K|
|*with recommended forepump|